Passive external radio frequency filter for Langmuir probes

Authors
Citation
Ae. Wendt, Passive external radio frequency filter for Langmuir probes, REV SCI INS, 72(7), 2001, pp. 2926-2930
Citations number
9
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
REVIEW OF SCIENTIFIC INSTRUMENTS
ISSN journal
0034-6748 → ACNP
Volume
72
Issue
7
Year of publication
2001
Pages
2926 - 2930
Database
ISI
SICI code
0034-6748(200107)72:7<2926:PERFFF>2.0.ZU;2-H
Abstract
A tunable passive circuit is introduced for radio frequency (rf) filtering of Langmuir probes used to measure plasma properties. The circuit produces a high impedance between the probe tip and ground so that the probe tip fol lows potential fluctuations in the plasma so that the probe bias voltage wi th respect to the plasma is constant on the time scale of rf fluctuations. Filtering is implemented at the fundamental frequency (13.56 MHz in this ca se) and the second and third harmonics. Representative probe traces and ele ctron energy distribution functions from an inductively coupled plasma are presented to demonstrate filter performance. (C) 2001 American Institute of Physics.