In this study, the plasma resonance in a surface wave sustained plasma was
investigated. Surface wave discharges have been successfully generated by a
microwave planar vane-type slow wave structure. Experimental results clear
ly demonstrated that the amplitude of the electric field of the microwave a
lways became a local maximum in the position where the plasma density was e
qual to the same value. When the operating gas pressure and the input micro
wave power were varied to change the plasma density profile, the location o
f the maximum of the electric field was found to shift in compliance with t
he plasma density profile. Meanwhile, the peak of the resonance response wa
s found to be proportional to the plasma density gradient while the spatial
width of plasma resonance was inversely proportional to the plasma density
gradient. These results were qualitatively in accordance with the theory.
(C) 2001 American Institute of Physics.