Reduction in feedback bandwidth of the force-controlled atomic force microscope using a polyimide cantilever

Citation
N. Kato et al., Reduction in feedback bandwidth of the force-controlled atomic force microscope using a polyimide cantilever, JPN J A P 1, 40(11), 2001, pp. 6594-6599
Citations number
29
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Volume
40
Issue
11
Year of publication
2001
Pages
6594 - 6599
Database
ISI
SICI code
0021-4922(200111)40:11<6594:RIFBOT>2.0.ZU;2-6
Abstract
In this paper we present a method of reducing the bandwidth required in the force-controlled atomic force microscope (AFM) for measuring the force cur ves. System stability strongly depends on the quality factor of vibration ( Q) of the cantilever. As polyimide has a low Q. a cantilever fabricated fro m it reduces the bandwidth required in the feedback system. A polyimide can tilever with dimensions of 540 x 155 x 3.4 mum(3) is fabricated to evaluate its Q in vacuum. density and Young's modulus. The measured Q is 50, which is much smaller than those of conventional cantilevers used for AFM. Using the measured mechanical properties of the polyimide, the required frequency response of the feedback system is estimated. Typical force curve measurem ents are confirmed by some numerical simulations.