Low-power gas sensors based on work-function measurement in low-cost hybrid flip-chip technology

Citation
M. Fleischer et al., Low-power gas sensors based on work-function measurement in low-cost hybrid flip-chip technology, SENS ACTU-B, 80(3), 2001, pp. 169-173
Citations number
8
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS B-CHEMICAL
ISSN journal
0925-4005 → ACNP
Volume
80
Issue
3
Year of publication
2001
Pages
169 - 173
Database
ISI
SICI code
0925-4005(200112)80:3<169:LGSBOW>2.0.ZU;2-K
Abstract
To implement low-power gas sensors with low component costs, the principle of work-function read out via a hybrid suspended gate FET (SGFET) is being pursued, whereby a freely selectable sensor film undergoes a reversible wor k-function change corresponding to the buildup of a potential difference on the surface in response to gas adsorption/reaction. This is read out via a n ISFET structure. An innovative design which allows cheap manufacturing wi ll be described for the principle that has already been successfully demons trated. The starting point of the design is a ceramic Al2O3 substrate coate d with conductor patterns and sensitive materials onto which the FET is mou nted in flip-chip technology. By means of the freely selectable sensor film and its preparation method, a wide range of applications can be opened up. (C) 2001 Elsevier Science B.V. All rights reserved.