Preparation of texture-controlled lead zirconate titanate diaphragm-type film actuator using a chemical solution method

Citation
T. Iijima et K. Kunii, Preparation of texture-controlled lead zirconate titanate diaphragm-type film actuator using a chemical solution method, JPN J A P 1, 40(9B), 2001, pp. 5740-5742
Citations number
8
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Volume
40
Issue
9B
Year of publication
2001
Pages
5740 - 5742
Database
ISI
SICI code
0021-4922(200109)40:9B<5740:POTLZT>2.0.ZU;2-5
Abstract
A diaphragm-type (100)-dominant-oriented tetragonal phase lead zirconate ti tanate (PZT) film actuator was fabricated. The ferroelectric properties of the texture-controlled PZT film were comparable to those of bulk PZT cerami cs. The displacement property of the PZT film actuator driven at +/- 20 V e xhibited a butterfly-like hysteresis. However, this butterfly shape showed an opposite direction to that of the typical displacement curve of bulk PZT ceramics. This depressed displacement property of the PZT film appears to indicate bend motion in the vertical direction on the film surface since th e film is not clamped, and it does not reflect the genuine piezoelectric pr operty. For a unipolar drive, the value of the displacement was about 220 n m at 20 V. The deflection amplitude of the diaphragm actuator showed a peak at 77.5 kHz. Therefore, the diaphragm of the texture-controlled PZT film i s considered to be applicable to microactuators.