Scheduling semiconductor wafer fabrication by using ordinal optimization-based simulation

Citation
Bw. Hsieh et al., Scheduling semiconductor wafer fabrication by using ordinal optimization-based simulation, IEEE ROBOT, 17(5), 2001, pp. 599-608
Citations number
30
Language
INGLESE
art.tipo
Article
Categorie Soggetti
AI Robotics and Automatic Control
Journal title
IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION
ISSN journal
1042-296X → ACNP
Volume
17
Issue
5
Year of publication
2001
Pages
599 - 608
Database
ISI
SICI code
1042-296X(200110)17:5<599:SSWFBU>2.0.ZU;2-6
Abstract
Computational efficiency is one of the major challenges of applying simulat ion to short-term operation scheduling of semiconductor wafer fabrication f actories (fabs), which are characterized by re-entrant process flows, strin gent production control requirements and fast changing technology and busin ess environments. This paper explores the application of the ordinal optimi zation (OO)-based simulation technique to efficiently selecting good rules for scheduling wafer fabrications. An efficient simulation tool, which make s use of OO and optimal computing budget allocation techniques, is develope d. Experiments with the OO-based simulation tool are conducted for static s election of good rules under different factors such as initial state, perfo rmance index and time horizon. Results indicate that one to two orders of c omputation time reduction over traditional simulations can be achieved and that what rules are good varies with factors of initial state, performance index and time horizon. These results motivate our further investigation ab out applications to dynamic selection of dispatching rules upon the occurre nce of two significant uncertain events: holding of significant amount of w afers-in-process due to engineering causes and major machine failures. Resu lts demonstrate the value of dynamic rule selection for uncertainty handlin g, the insightful selection of good rules and the needs for future research .