Cross section data in the energy range above 1 eV have been critically eval
uated for electron impact collision processes involving the impurity specie
s (CO, CO2, and H2O) most relevant to low-temperature plasmas. A short revi
ew of the cross section measurements is given for each collision process. T
he literature has been surveyed up to December 1999. Analytic fits to the r
ecommended cross sections are also presented. (C) 2001 Academic Press.