K. Takada et al., Low-crosstalk 10-GHz-Spaced 512-channel arrayed-waveguide grating multi/demultiplexer fabricated on a 4-in wafer, IEEE PHOTON, 13(11), 2001, pp. 1182-1184
In this letter, we report a 10-GHz-spaced 512-channel arrayed-waveguide gra
ting (AWG) multi/demultiplexer fabricated on a 4-in wafer. We achieved this
by folding the 7-cm-long slab waveguides of a conventionally configured AW
G, so that the whole configuration was contained in the wafer and then atta
ched reflecting mirrors at the folded parts. Phase compensation of the fabr
icated AWG was performed by means of ultraviolet irradiation through a meta
l mask.