Low-crosstalk 10-GHz-Spaced 512-channel arrayed-waveguide grating multi/demultiplexer fabricated on a 4-in wafer

Citation
K. Takada et al., Low-crosstalk 10-GHz-Spaced 512-channel arrayed-waveguide grating multi/demultiplexer fabricated on a 4-in wafer, IEEE PHOTON, 13(11), 2001, pp. 1182-1184
Citations number
7
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
IEEE PHOTONICS TECHNOLOGY LETTERS
ISSN journal
1041-1135 → ACNP
Volume
13
Issue
11
Year of publication
2001
Pages
1182 - 1184
Database
ISI
SICI code
1041-1135(200111)13:11<1182:L15AGM>2.0.ZU;2-W
Abstract
In this letter, we report a 10-GHz-spaced 512-channel arrayed-waveguide gra ting (AWG) multi/demultiplexer fabricated on a 4-in wafer. We achieved this by folding the 7-cm-long slab waveguides of a conventionally configured AW G, so that the whole configuration was contained in the wafer and then atta ched reflecting mirrors at the folded parts. Phase compensation of the fabr icated AWG was performed by means of ultraviolet irradiation through a meta l mask.