Solid-state thin-film supercapacitor with ruthenium oxide and solid electrolyte thin films

Citation
Ys. Yoon et al., Solid-state thin-film supercapacitor with ruthenium oxide and solid electrolyte thin films, J POWER SOU, 101(1), 2001, pp. 126-129
Citations number
15
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Physical Chemistry/Chemical Physics","Environmental Engineering & Energy
Journal title
JOURNAL OF POWER SOURCES
ISSN journal
0378-7753 → ACNP
Volume
101
Issue
1
Year of publication
2001
Pages
126 - 129
Database
ISI
SICI code
0378-7753(20011001)101:1<126:STSWRO>2.0.ZU;2-Z
Abstract
Direct current reactive sputtering deposition of ruthenium oxide thin films (bottom and top electrodes) at 400 degreesC are performed to produce a sol id-state thin-film supercapacitor (TFSC). The supercapacitor has a cell str ucture of RuO2/Li2.94PO2.37N0.75 (Lipon)/RuO2/Pt. Radio frequency, reactive sputtering deposition of an Li2.94PO2.37N0.75 electrolyte film is performe d on the bottom RuO2 film at room temperature to separate the bottom and to p RuO2 electrodes electrically. The stoichiometry of the RuO2 thin film is investigated by Rutherford backscattering spectrometry (RBS). X-ray diffrac tion (XRD) shows that the as-deposited RuO2 thin film is an amorphous phase . Scanning electron microscopy (SEM) measurements reveal that the RuO2/Lipo n/RuO2 hetero-interfaces have no inter-diffusion problems. Charge-discharge measurements with constant current at room temperature clearly reveal typi cal supercapacitor behaviour for a RuO2/Lipon/RuO2/ Pt cell structure. Sinc e the electrolyte thin film has low ionic mobility, the capacity and cycle performance are inferior to those of a bulk type of supercapacitor. These r esults indicate that a high performance, TFSC can be fabricated by a solid electrolyte thin film with high ionic conductivity. (C) 2001 Elsevier Scien ce B.V. All rights reserved.