Recently, we have established a novel deposition technique for semiconducto
r thin films, namely photochemical deposition (PCD), in which the compound
formation is activated by ultraviolet illumination. In the present work, th
e electrical properties of the PCD-CdS films grown under different conditio
ns are analyzed and presented. Their resistivity is high at room temperatur
e and decreases with increasing temperature with an activation energy of ab
out 0.9 eV.