Integrated sculptured thin films

Authors
Citation
M. Suzuki et Y. Taga, Integrated sculptured thin films, JPN J A P 2, 40(4A), 2001, pp. L358-L359
Citations number
7
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Volume
40
Issue
4A
Year of publication
2001
Pages
L358 - L359
Database
ISI
SICI code
0021-4922(20010401)40:4A<L358:ISTF>2.0.ZU;2-V
Abstract
We have demonstrated the integration of various morphologies generated by d ynamic oblique deposition, during which the deposition angle and the azimut h of the substrate are varied. The layers with zigzag, helicoidal and cylin drical columns have been successfully stacked on a substrate without using any etching process. In addition, the uniform and flat layer is formed on p orous layers by a gradual change in the deposition geometry. Therefore, sha pe-related physical anisotropies and the chemical activity due to high poro sity can be integrated in one thin film, making it applicable to devices su ch as solar cells and chemical sensors.