The effects of hydrogen on Pt/(Pb, La)(Zr, Ti)O-3(PLZT)/Pt capacitors have
been investigated using atomic force microscopy piezoelectric measurements.
The study revealed that the capacitors consist of submicron-sized ferroele
ctric domains, which were randomly distributed at positive or negative rema
nent states. After hydrogen annealing, it was observed that the local piezo
electric hysteresis loops of each domain shifted along both the voltage axi
s and the polarization axis. The degradation of remanent polarization can b
e explained by the shifted hysteresis of each domain. The degradation of sa
turation polarization can be understood to have been caused by the nonswitc
hing portion within the capacitor. (C) 2001 American Institute of Physics.