When a thin oxide is subjected to heavy ion irradiation, a large leakage cu
rrent similar to the soft breakdown can be produced. In this work, we have
studied the radiation soft breakdown (RSB) after 257 MeV Ag and I irradiati
on by using a quantum point contact (QPC) model, which also applies to hard
and soft breakdown produced by electrical stresses. We have also studied t
he temperature dependence of RSB current from 98 K up to room temperature,
and found that the gate current after irradiation is strongly reduced by de
creasing temperature. It is shown that this behavior can be attributed to a
temperature dependence of the carriers supplied from the cathode rather th
an to a temperature-induced modification of the size and/or shape of the ox
ide RSB paths. (C) 2001 American Institute of Physics.