Pulsed liquid-injection metalorganic chemical vapor deposition of (La0.7Sr0.3MnO3/SrTiO3)(15) superlattices

Citation
C. Dubourdieu et al., Pulsed liquid-injection metalorganic chemical vapor deposition of (La0.7Sr0.3MnO3/SrTiO3)(15) superlattices, APPL PHYS L, 79(9), 2001, pp. 1246-1248
Citations number
22
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
APPLIED PHYSICS LETTERS
ISSN journal
0003-6951 → ACNP
Volume
79
Issue
9
Year of publication
2001
Pages
1246 - 1248
Database
ISI
SICI code
0003-6951(20010827)79:9<1246:PLMCVD>2.0.ZU;2-O
Abstract
(La0.7Sr0.3MnO3/SrTiO3)(15) superlattices have been grown by pulsed liquid- injection metalorganic chemical vapor deposition on monocrystalline substra tes such as LaAlO3, SrTiO3, and MgO. The pulsed-injection technique allows one to control precisely the amount of precursors delivered to the depositi on chamber and thus the thickness of each individual layer. The period of t he superlattices depends indeed linearly on the number of injected droplets . In our deposition conditions, the average growth rates are similar to0.13 0 nm/injection for La0.7Sr0.3MnO3 and 0.042 nm/injection for SrTiO3, with n o significant difference as regard to the substrate used. The strain's stat e of the superlattices depends on the relative thicknesses of the La0.7Sr0. 3MnO3 and SrTiO3 layers and also on the substrate used. Finally, the deposi tion of superlattices with ultrathin interlayers of few unit cells has been demonstrated. (C) 2001 American Institute of Physics.