Sputtering and reactive ion etching damage to the Pt/Pb(Zr,Ti)O-3/Pt thin film capacitors

Citation
Eg. Lee et al., Sputtering and reactive ion etching damage to the Pt/Pb(Zr,Ti)O-3/Pt thin film capacitors, J MAT SCI L, 20(8), 2001, pp. 769-772
Citations number
16
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF MATERIALS SCIENCE LETTERS
ISSN journal
0261-8028 → ACNP
Volume
20
Issue
8
Year of publication
2001
Pages
769 - 772
Database
ISI
SICI code
0261-8028(2001)20:8<769:SARIED>2.0.ZU;2-Q