Synthesis and properties of KTN films by sol-gel deposition and RF-magnetron sputtering

Citation
B. Tunaboylu et al., Synthesis and properties of KTN films by sol-gel deposition and RF-magnetron sputtering, FERROELEC L, 28(3-4), 2001, pp. 75-84
Citations number
15
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
FERROELECTRICS LETTERS SECTION
ISSN journal
0731-5171 → ACNP
Volume
28
Issue
3-4
Year of publication
2001
Pages
75 - 84
Database
ISI
SICI code
0731-5171(2001)28:3-4<75:SAPOKF>2.0.ZU;2-P
Abstract
Homogeneous KTN (Potassium Tantalate Niobate) solutions were prepared using potassium acetate and metal alkoxides in 2-methoxyethanol by controlled hy drolysis with 1:2 (KTN/H2O) molar ratio. We report on the synthesis of sol- gel KTN for both the fabrication of homogeneous, dense and stoichiometrical ly correct ceramic discs by hot isostatic pressing and the deposition of sp in-on as well as sputtered thin films. The spin-on KTN films on Pt/Si or r- sapphire were polycrystalline and stoichiometric, however, sputtered films on sapphire were fully (100) oriented and polycrystalline on Pt/SiO2/Si sub strates with some potassium deficiency. The refractive indices of sputtered , dense KTN films on sapphire were between 2.00 and 2.05.