New planar lightwave circuit (PLC) platform eliminating Si terraces and its application to opto-electronic hybrid integrated modules

Citation
T. Yamada et al., New planar lightwave circuit (PLC) platform eliminating Si terraces and its application to opto-electronic hybrid integrated modules, IEICE TR EL, E84C(5), 2001, pp. 685-692
Citations number
9
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
IEICE TRANSACTIONS ON ELECTRONICS
ISSN journal
0916-8524 → ACNP
Volume
E84C
Issue
5
Year of publication
2001
Pages
685 - 692
Database
ISI
SICI code
0916-8524(200105)E84C:5<685:NPLC(P>2.0.ZU;2-O
Abstract
We have developed a new planar lightwave circuit (PLC) platform eliminating Si terraces for hybrid integrated optical modules. This PLC platform has t he advantage of a lower fabrication cost than the conventional PLC platform with an Si terrace, because it does not require fabrication processes such as Si terrace forming and mechanical polishing. Using our new PLC platform structure, we fabricated a transceiver for optical access networks and an 8-channel multi-channel photoreceiver for wavelength division multiplexing (WDM) interconnection systems.