Effects of SiOx-incorporation hydrocarbons on the tribological properties of DLC films

Citation
Ly. Chen et Fcn. Hong, Effects of SiOx-incorporation hydrocarbons on the tribological properties of DLC films, DIAM RELAT, 10(3-7), 2001, pp. 1058-1062
Citations number
10
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
DIAMOND AND RELATED MATERIALS
ISSN journal
0925-9635 → ACNP
Volume
10
Issue
3-7
Year of publication
2001
Pages
1058 - 1062
Database
ISI
SICI code
0925-9635(200103/07)10:3-7<1058:EOSHOT>2.0.ZU;2-R
Abstract
The effects of hexamethylsiloxane (HMDSO) reactants are studied on the adhe sion and tribological properties of DLC films deposited directly on steel a nd Cr substrates. A 13.56-MHz magnetically confined inductively coupled pla sma (ICP) system has been applied to deposit diamond-like carbon films usin g CH, and Si-containing hydrocarbon reactant with bipolar-pulsed substrate bias. The RF power is varied from 100 W to 400 W and the substrate bias is varied in the range of 100-400 V to obtain films of different sp(2)/sp(3) c arbon ratios. The films are deposited on Si, nitriding SKD11, and Cr-plated SKD11 substrates. By employing CH, reactant, the quality of DLC films is o ptimized at an RF power of 200 W and a substrate bias of 300 V on Si as ind icated by Raman spectra. However, DLC films cannot be deposited directly on steel substrates. Only disintegrated graphite-like powders are observed on steel. By employing HMDSO reactant containing Si and O atoms, a-C:H/SiOx f ilms can be deposited directly on steel substrates with very good adherence . XPS results indicate that carbon is bonded to carbon only and silicon is bonded to oxygen only. No bonding between C and Si is observed. TEM is bein g further employed to characterize the microstructure to identify if SiOx n anoparticles are formed in the DLC matrix. The films deposited directly on steel using HMDSO show good wear behavior. (C) 2001 Elsevier Science B.V. A ll rights reserved.