Microfabricated transition-edge x-ray detectors

Citation
Gc. Hilton et al., Microfabricated transition-edge x-ray detectors, IEEE APPL S, 11(1), 2001, pp. 739-742
Citations number
13
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
ISSN journal
1051-8223 → ACNP
Volume
11
Issue
1
Year of publication
2001
Part
1
Pages
739 - 742
Database
ISI
SICI code
1051-8223(200103)11:1<739:MTXD>2.0.ZU;2-I
Abstract
We are developing high performance x-ray detectors based on superconducting transition-edge sensors (TES) for application in materials analysis and as tronomy. Using our recently developed fully lithographic TES fabrication pr ocess, we have made devices with an energy resolution of 4.5 +/- 0.1 eV for 5.9 keV x-rays, the best reported energy resolution for any energy dispers ive detectors in this energy range. These detectors utilize micromachined t hermal isolation structures and transition-edge sensors fabricated from Mo/ Cu bilayers with normal-metal boundary conditions. We have found the normal -metal boundary conditions to be critical to stable and reproducible low no ise operation. In this paper we present details of fabrication and performa nce of these devices.