Surface shape measurement by wavelength scanning interferometry using an electronically tuned Ti : sapphire laser

Citation
A. Yamamoto et al., Surface shape measurement by wavelength scanning interferometry using an electronically tuned Ti : sapphire laser, OPT REV, 8(1), 2001, pp. 59-63
Citations number
12
Language
INGLESE
art.tipo
Review
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
OPTICAL REVIEW
ISSN journal
1340-6000 → ACNP
Volume
8
Issue
1
Year of publication
2001
Pages
59 - 63
Database
ISI
SICI code
1340-6000(200101/02)8:1<59:SSMBWS>2.0.ZU;2-P
Abstract
We developed a high speed and high resolution surface shape measurement sys tem based on wavelength scanning interferometry with an electronically tune d Ti:sapphire laser. This laser emits pulses and the wavelength of each pul se can be tuned arbitrarily within 680 nm and 1056 nm. We also designed a h igh speed multiport CCD camera as a detector. This camera is synchronized w ith wavelength scanning of the laser at the frequency of 250 Hz. We could m easure the object shape with a height resolution of 3.05 mum at the tuning range from 740.0 nm to 842.3 nm. By simple parabolic curve fitting to the F ourier peak of interference signals from each CCD pixel, the height resolut ion has been improved to the order of submicrometers.