Effects of hybrid structure top electrodes of PZT capacitors on hydrogen-induced damage

Citation
Jm. Koo et al., Effects of hybrid structure top electrodes of PZT capacitors on hydrogen-induced damage, J KOR PHYS, 38(3), 2001, pp. 273-276
Citations number
13
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Physics
Journal title
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
ISSN journal
0374-4884 → ACNP
Volume
38
Issue
3
Year of publication
2001
Pages
273 - 276
Database
ISI
SICI code
0374-4884(200103)38:3<273:EOHSTE>2.0.ZU;2-4
Abstract
We propose that Ti/Ir hybrid structure top electrodes improve resistance ag ainst hydrogen-induced damage. As the ratio of Ti/Ir increases, the capacit ors show enhanced endurance against hydrogen damage. Especially, PZT (350 n m) capacitors with Ti(80 nm)/Ir(20 nm) hybrid top electrodes show only a 16 % decrease in nonvolatile polarization under +/- 7 V while the nonvolatile polarization of ferroelectric capacitors with Ir top electrodes is reduced by 62.1 % after forming gas annealing at 250 degreesC for 10 min. The XPS analysis shows that the ferroelectric characteristics of PZT thin film capa citors with the catalytic top electrodes (Ir, Pt) are degraded by destructi on of Pb-O bond into metallic Pb due to hydrogen annealing.