Fabrication and characteristics of piezoelectric PZT cantilever for high speed atomic force microscopy

Citation
Hj. Nam et al., Fabrication and characteristics of piezoelectric PZT cantilever for high speed atomic force microscopy, INTEGR FERR, 35(1-4), 2001, pp. 1915-1927
Citations number
9
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Eletrical & Eletronics Engineeing
Journal title
INTEGRATED FERROELECTRICS
ISSN journal
1058-4587 → ACNP
Volume
35
Issue
1-4
Year of publication
2001
Pages
1915 - 1927
Database
ISI
SICI code
1058-4587(2001)35:1-4<1915:FACOPP>2.0.ZU;2-Y
Abstract
A PZT actuator integrated onto cantilever structure was fabricated for high speed atomic force microscopy (AFM). Five different electrodes were used t o investigate the effect of top electrodes on the adhesion and the electric al properties in the PZT capacitors. The PZT capacitors with RuO2 top elect rodes exhibited the best characteristics of five electrodes. The tip deflec tion and the resonant frequency of the PZT actuator were 11 mum at 10V and 79 kHz, respectively. The PZT actuator provided much better AFM image quali ty and imaging speed than those done by using the conventional bulk PZT tub e scanner. The creep distortion in the AFM image was greatly improved by us ing the high speed PZT film actuator.