Micromachined uncooled IR bolometer linear array using VO2 thin films

Citation
Ch. Chen et al., Micromachined uncooled IR bolometer linear array using VO2 thin films, INT J INFRA, 22(1), 2001, pp. 53-58
Citations number
8
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES
ISSN journal
0195-9271 → ACNP
Volume
22
Issue
1
Year of publication
2001
Pages
53 - 58
Database
ISI
SICI code
0195-9271(200101)22:1<53:MUIBLA>2.0.ZU;2-D
Abstract
Mixed vanadium oxide thin films, as VO2 for the main composition are materi als for uncooled microbolometer due to their high temperature coefficient o f resistance (TCR) at room temperature, This paper describes the design and fabrication of 8-element linear array IR uncooled microbolometers using th e films acid micromachining technology. The characteristics of the array is investigated in the spectral region of 8-12 mum. The fabricated detectors exhibit responsivity of up to 10KV/W, typical detectivity of 1.89x10(8)cmH( 1/2)/W, and thermal time constant of 11ms, at 296K and at a frequency of 30 Hz, Furthermore, The uncorrected response uniformity of the linear array bo lometers is less than 20%.