Electron stimulated gas desorption from copper material and its surface analysis

Citation
M. Nishiwaki et S. Kato, Electron stimulated gas desorption from copper material and its surface analysis, APPL SURF S, 169, 2001, pp. 700-705
Citations number
13
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
0169-4332 → ACNP
Volume
169
Year of publication
2001
Pages
700 - 705
Database
ISI
SICI code
0169-4332(20010115)169:<700:ESGDFC>2.0.ZU;2-Q
Abstract
In the KEKB accelerator that is a two ring electron-positron collider, the vacuum chambers were mainly made of oxygen free copper (OFC). To obtain qua ntitative data on outgassing from the copper surface irradiated by energeti c particles in systems such as particle accelerators and plasma based devic es, we focused on a measurement of electron stimulated gas desorption (ESD) from copper materials. Four different samples were prepared to make comparison, that is, as-receiv ed, treated with sulfuric acid and hydrogen peroxide (SH), treated with cit ric acid (CT) and treated with SH + CT. In order to quantitatively measure the ESD rates from those surfaces, a throughput method was used with a cali brated RGA. Surface characterization of those samples was also done by Auge r electron spectroscopy (AES) with sputter etching. According to the results of AES depth profiling and the ESD yields, the tre atment with SH proved to be the most promising property, (C) 2001 Elsevier Science B.V. All rights reserved.