In the KEKB accelerator that is a two ring electron-positron collider, the
vacuum chambers were mainly made of oxygen free copper (OFC). To obtain qua
ntitative data on outgassing from the copper surface irradiated by energeti
c particles in systems such as particle accelerators and plasma based devic
es, we focused on a measurement of electron stimulated gas desorption (ESD)
from copper materials.
Four different samples were prepared to make comparison, that is, as-receiv
ed, treated with sulfuric acid and hydrogen peroxide (SH), treated with cit
ric acid (CT) and treated with SH + CT. In order to quantitatively measure
the ESD rates from those surfaces, a throughput method was used with a cali
brated RGA. Surface characterization of those samples was also done by Auge
r electron spectroscopy (AES) with sputter etching.
According to the results of AES depth profiling and the ESD yields, the tre
atment with SH proved to be the most promising property, (C) 2001 Elsevier
Science B.V. All rights reserved.