Spatial distributions of ion-species in a large-volume inductively coupledplasma source

Citation
S. Okuji et al., Spatial distributions of ion-species in a large-volume inductively coupledplasma source, SURF COAT, 136(1-3), 2001, pp. 102-105
Citations number
4
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Material Science & Engineering
Journal title
SURFACE & COATINGS TECHNOLOGY
ISSN journal
0257-8972 → ACNP
Volume
136
Issue
1-3
Year of publication
2001
Pages
102 - 105
Database
ISI
SICI code
0257-8972(20010202)136:1-3<102:SDOIIA>2.0.ZU;2-U
Abstract
Distributions of plasma parameters, such as electron temperature and electr on density have been studied for large-volume processing. In terms of preci se study of large-volume plasma, ion-species distributions in plasma should be measured as well as those of plasma parameters. However, no method to m easure the spatial distributions of ion species has been developed so far. In this study, we construct a new apparatus to measure the ion-species dist ribution by using a quadrupole mass spectrometer, which can be moved in vac uum perpendicularly to the beam extraction. Furthermore, we propose a new m ethod to generate uniform plasma by introducing gas in pulse and generate p ulsed plasma correspondently with the gas introduction. The results suggest that the ion-species distributions are not consistent with the electron-de nsity distribution and spatial distributions of ion species can be improved by introducing gas in pulse and generating pulsed plasma. For further stud y towards the next-generation semiconductor fabrication, the ion-species di stributions in large-volume plasma should be taken into account as well as those of the other plasma parameters. (C) 2001 Elsevier Science B.V. All ri ghts reserved.