YBa2Cu3O7-y ramp-type Josephson junctions with PrBa2Cu3O7-y and SrTiO3 barr
iers have been fabricated on SrTiO4 (001) substrates. The surface morpholog
y of the ramp-edge was examined using the atomic force microscope (AFM). Th
e conditions of the photolithography process and the ion beam incident angl
e were optimized to improve the surface roughness at the ramp edge. Typical
ly, smooth surfaces at the ramp-edge with a ramp angle of about 25 degrees
and an average roughness of about 3 nm was achieved. Results indicate the j
unction properties are improved with a smooth ramp-edge surface. The detail
s are discussed.