Microengineered, non-planar piezoelectric structures can offer solutions to
a variety of challenging problems arising in the microsystem technologies.
Besides the piezoelectric polymers, which can easily be shaped, there has
also been significant progress in developing fabrication technologies based
on thin layers of the lead - zirconate - titanate family of piezoceramics.
The processing methods include dip-casting, printing, cathodic electrosynt
hesis, electrolytic deposition, hydrothermal synthesis, electrophoretic dep
osition, sputtering and laser ablation deposition. These processing methods
are reviewed with emphasis placed on the screen-printing, gravure-offset p
rinting (GOP) and sol-gel deposition technologies. The performance of PZT p
rinted film actuators on corrugated metal substrates has been investigated
using the ANSYS simulation program. The corrugated beam structures clamped
at both ends showed tens times larger deflections than flat structures. It
has been shown, that a clamped corrugated beam does not need a substrate fo
r static deflection generation.