Non-planar piezoelectric film structures

Citation
S. Leppavuori et al., Non-planar piezoelectric film structures, FERROELECTR, 232(1-4), 1999, pp. 1033-1038
Citations number
19
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
FERROELECTRICS
ISSN journal
0015-0193 → ACNP
Volume
232
Issue
1-4
Year of publication
1999
Pages
1033 - 1038
Database
ISI
SICI code
0015-0193(1999)232:1-4<1033:NPFS>2.0.ZU;2-5
Abstract
Microengineered, non-planar piezoelectric structures can offer solutions to a variety of challenging problems arising in the microsystem technologies. Besides the piezoelectric polymers, which can easily be shaped, there has also been significant progress in developing fabrication technologies based on thin layers of the lead - zirconate - titanate family of piezoceramics. The processing methods include dip-casting, printing, cathodic electrosynt hesis, electrolytic deposition, hydrothermal synthesis, electrophoretic dep osition, sputtering and laser ablation deposition. These processing methods are reviewed with emphasis placed on the screen-printing, gravure-offset p rinting (GOP) and sol-gel deposition technologies. The performance of PZT p rinted film actuators on corrugated metal substrates has been investigated using the ANSYS simulation program. The corrugated beam structures clamped at both ends showed tens times larger deflections than flat structures. It has been shown, that a clamped corrugated beam does not need a substrate fo r static deflection generation.