Optimization of physical filtering for selective high temperature H-2 sensors

Citation
T. Weh et al., Optimization of physical filtering for selective high temperature H-2 sensors, SENS ACTU-B, 68(1-3), 2000, pp. 146-150
Citations number
6
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS B-CHEMICAL
ISSN journal
0925-4005 → ACNP
Volume
68
Issue
1-3
Year of publication
2000
Pages
146 - 150
Database
ISI
SICI code
0925-4005(20000825)68:1-3<146:OOPFFS>2.0.ZU;2-K
Abstract
This paper investigates the improvement in selectivity by means of applying physical gas filter. Looking for a selective and highly sensitive hydrogen sensor, various filter systems, single, dual and buried filter systems, we re deposited on top of a basic high-temperature semiconducting Ga2O3 thin f ilm sensor. Sensor respondence on a big variety of gases present in domesti c ambience and especially hydrogen and ethane, which is the hardest test on cross sensitivity, is shown. Using a single filter SiO2 layer a selective hydrogen sensor is realized, which is able to detect 50 ppm hydrogen at an operation temperature of 700 degrees C in humid air without any interferenc e caused by other gases. Dual SiO2/metal oxide filter systems and buried me tal oxide layer filters show behaviors varying from selective ethane to sel ective hydrogen detection. (C) 2000 Elsevier Science S.A. All rights reserv ed.