Density and refractive index of TiO2 films prepared by reactive evaporation

Citation
D. Mergel et al., Density and refractive index of TiO2 films prepared by reactive evaporation, THIN SOL FI, 371(1-2), 2000, pp. 218-224
Citations number
14
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
0040-6090 → ACNP
Volume
371
Issue
1-2
Year of publication
2000
Pages
218 - 224
Database
ISI
SICI code
0040-6090(20000801)371:1-2<218:DARIOT>2.0.ZU;2-B
Abstract
Thin amorphous films of titania were prepared by reactive evaporation at 30 0 degrees C and at various pressures and deposition rates. The refractive i ndex n and the thickness of the films were determined from transmission spe ctra. The density rho of the films decreases when the mean free path length during deposition becomes smaller than the distance between source and sub strate. A formula to describe the experimental data for n as a function of rho is given. A Clausius-Mosotti analysis of n confirms the results of one group of the existing controversial literature. It is, however, shown that the often used classical Lorentz-Lorenz plot is generally not appropriate f or experimental data obtained on thin films due to their inhomogeneous natu re. (C) 2000 Elsevier Science S.A. All rights reserved.