Semiconducting Ga2O3 thin films react with several different gases at tempe
ratures higher than 600 degrees C changing its conductivity. These changes
of conductivity are measured by using a Platinum pattern underneath the Ga2
O3 surface, in this project we added on a Ga2O3 surface, which by itself sh
ows no strong activity as oxidation catalyst, Iridium, Rhodium and Rutheniu
m compounds, which change the sensitivity of the used sensors. Dissolved in
organic solvents, these compounds were dispensed on the surface, then - by
heating - converted into oxides and metals. This thermal decomposition pro
cess led to the formation of clusters. The so formed new sensors showed a h
igh reproducibility and stability of their gas-sensitive electrical propert
ies. To characterize the sensors they were tested with a variety of differe
nt gases and at different temperatures. Interesting results on very low con
centrations of Ethanol and Propane were found. (C) 2000 Elsevier Science S.
A. All rights reserved.