Resolution deterioration in emission electron microscopy due to object roughness

Citation
Sa. Nepijko et al., Resolution deterioration in emission electron microscopy due to object roughness, ANN PHYSIK, 9(6), 2000, pp. 441-451
Citations number
22
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Physics
Journal title
Volume
9
Issue
6
Year of publication
2000
Pages
441 - 451
Database
ISI
SICI code
Abstract
In the present paper a general analytic expression has been obtained and co nfirmed by a computer simulation which links the surface roughness of an ob ject under study in an emission electron microscope and it's resolution. A quantitative derivation was made for the model case when there is a step on the object surface. It was shown that the resolution is deteriorated asymm etrically relative to the step. The effect sets a practical limit to the ul timate lateral resolution obtainable in an emission electron microscope.