Influences of preparation conditions of sols on hardening behaviors of silica gel films for micro-patterning

Citation
A. Matsuda et al., Influences of preparation conditions of sols on hardening behaviors of silica gel films for micro-patterning, J CERAM S J, 108(6), 2000, pp. 604-606
Citations number
11
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF THE CERAMIC SOCIETY OF JAPAN
ISSN journal
0914-5400 → ACNP
Volume
108
Issue
6
Year of publication
2000
Pages
604 - 606
Database
ISI
SICI code
0914-5400(200006)108:6<604:IOPCOS>2.0.ZU;2-Y
Abstract
Changes in refractive index, thickness and structure of the poly (ethylene glycol), (PEG), -containing silica gel films, prepared under various concen trations of hydrochloric acid during the exposure to an ambient atmosphere at room temperature, have been investigated to determine the influence of p reparation conditions on the hardening behavior of the films in a patternin g process, The PEG-containing silica gel films, derived from silica sols wh ich were prepared under lower hydrochloric acid concentration, showed a ste ep increase in refractive index and large shrinkage upon increasing the exp osure time. The increase in refractive index and shrinkage of the films wer e found to reflect the decrease of SI-OH groups and the development of Si-O -Si network in the films, acceding to infrared absorption spectra, The proc ess time to emboss micropatterns was shortened by using the gel films deriv ed from silica sols which were prepared under a low hydrochloric acid conce ntration. This result suggests that the silica gel film with a low degree o f polymerization hardens rapidly.