The control of B-N and B-C bonds in BCN films synthesized using pulsed laser deposition

Wada, Y Yap, YK Yoshimura, M Mori, Y Sasaki, T

Y. Wada et al., The control of B-N and B-C bonds in BCN films synthesized using pulsed laser deposition, DIAM RELAT, 9(3-6), 2000, pp. 620-624

18

INGLESE

Article

Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering

DIAMOND AND RELATED MATERIALS

0925-9635 → ACNP

9

3-6

2000

620 - 624

ISI

0925-9635(200004/05)9:3-6<620:TCOBAB>2.0.ZU;2-P

A novel chemical bond transformation from B-N to B-C was observed in BCN fi lms synthesized using pulsed laser deposition (PLD). BCN film prepared by u sing green laser (lambda =532 nm) induced two IR absorption at 1370 and 800 cm(-1). This film was dominated by amorphous carbon phase and sp(2) hybrid ized BN bonds. BCN film deposited using an ultraviolet (UV) laser (lambda = 266 nm) induced an addition infrared (IR) absorption at 1250 cm(-1). As we deposit BCN film by deep-UV laser (lambda = 213 nm), the absorption at 137 0 and 800 cm(-1) disappeared while the absorption at 1250 cm(-1) remained. According to X-ray photoelectron spectroscopy (XPS), B-C bonds with a carbo n rich composition were formed. The formation of B-C bonds in BCN films was also sensitive to deposition gas pressure and substrate temperature. React ive carbon and boron species were needed to enable B-C bonds that hybridize d the carbon and the BN phases. A low substrate temperature was required to avoid competition with sp(2) hybridized pure BN and pure carbon bonds. (C) 2000 Elsevier Science S.A. All rights reserved.