A novel chemical bond transformation from B-N to B-C was observed in BCN fi
lms synthesized using pulsed laser deposition (PLD). BCN film prepared by u
sing green laser (lambda =532 nm) induced two IR absorption at 1370 and 800
cm(-1). This film was dominated by amorphous carbon phase and sp(2) hybrid
ized BN bonds. BCN film deposited using an ultraviolet (UV) laser (lambda =
266 nm) induced an addition infrared (IR) absorption at 1250 cm(-1). As we
deposit BCN film by deep-UV laser (lambda = 213 nm), the absorption at 137
0 and 800 cm(-1) disappeared while the absorption at 1250 cm(-1) remained.
According to X-ray photoelectron spectroscopy (XPS), B-C bonds with a carbo
n rich composition were formed. The formation of B-C bonds in BCN films was
also sensitive to deposition gas pressure and substrate temperature. React
ive carbon and boron species were needed to enable B-C bonds that hybridize
d the carbon and the BN phases. A low substrate temperature was required to
avoid competition with sp(2) hybridized pure BN and pure carbon bonds. (C)
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