Carbon protective films prepared by ECR plasma sputteing

Citation
S. Hirono et al., Carbon protective films prepared by ECR plasma sputteing, J JPN SOC T, 45(3), 2000, pp. 204-210
Citations number
10
Language
GIAPPONESE
art.tipo
Article
Categorie Soggetti
Mechanical Engineering
Journal title
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS
ISSN journal
0915-1168 → ACNP
Volume
45
Issue
3
Year of publication
2000
Pages
204 - 210
Database
ISI
SICI code
0915-1168(2000)45:3<204:CPFPBE>2.0.ZU;2-U