Stamp technology for fabrication of field emitter from organic material

Citation
A. Baba et al., Stamp technology for fabrication of field emitter from organic material, J VAC SCI B, 18(2), 2000, pp. 877-879
Citations number
8
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
1071-1023 → ACNP
Volume
18
Issue
2
Year of publication
2000
Pages
877 - 879
Database
ISI
SICI code
1071-1023(200003/04)18:2<877:STFFOF>2.0.ZU;2-D
Abstract
We propose and demonstrate a novel processing technique for fabrication of field electron emitter arrays. A stamp technology was used, in which the em itter tips are prepared by transferring the shape of a mold to an organic m aterial through pressing the mold against the organic material. The transfo rmed organic material is then modified by ion irradiation to produce a carb on based emitter material. The starting material tested was a polyimide fil m spin coated and cured on a Si substrate. The mold was prepared using anis otropic etching of Si(100). It has been found that the mold shape can be co mpletely transferred to the polyimide by applying a pressure of 1 GPa at 25 0 degrees C. A field emission current up to the order of mu A was obtained from a wedge-shaped emitter array made using this new technology with modif ication using Ar ion irradiation at an energy of 100 keV, a dose of 3 X 10( 16) cm(-2). (C) 2000 American Vacuum Society. [S0734-211X(00)00802-7].