Laser direct writing of copper on polyimide surfaces from solution

Citation
K. Kordas et al., Laser direct writing of copper on polyimide surfaces from solution, APPL SURF S, 154, 2000, pp. 399-404
Citations number
23
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
0169-4332 → ACNP
Volume
154
Year of publication
2000
Pages
399 - 404
Database
ISI
SICI code
0169-4332(200002)154:<399:LDWOCO>2.0.ZU;2-J
Abstract
Conductive copper patterns were deposited on polyimide (PI) substrates by u sing a focused, scanned continuous wave (cw) Ar+ laser beam at 488 nm wavel ength. The deposition process was initiated by a photothermal reaction of a tartarate-complex solution of Cu2+ ions in an alkaline and reducing enviro nment. Deposits were characterised by Field Emission Scanning Electron Micr oscope (FESEM), Energy Dispersive X-ray (EDX) Spectrometry, DEKTAK profilom eter and resistance measurements. The dependence of the characteristics of laser direct written patterns on the scanning speed of the laser beam, numb er of scans and laser power was examined. Uniform copper lines covered with copper-oxide (line width from 30 to 60 mu m and height from 2 to 20 mu m) with high conductivity and adhesion were achieved under optimised condition s. (C) 2000 Elsevier Science B.V. All rights reserved.