KTa0.65Nb0.35O3(KTN) thin films were prepared by sol-gel process on Pt(111)
/Ti/MgO(100) substrates from KOAc, Ta(OC2H5)(5) and Nb(OC2H5)(5) in ethanol
. The KTN thin films had a prefferred (100) orientation on Pt(111)/Ti/MgO(1
00) substrates and contained a small amount of pyrochlore structure phase.
The 0.8-mu m-thick KTN film showed a room-temperature relative permittivity
of 2160 and a room-temperature dielectric loss of 0.0098 at 1.0 kHz. The m
aximum relative permittivity of the KTN film was 4232 at 294 K and 1.0 kHz.
The remanent polarization and coercive field of the KTN film were 2.8 mu C
/cm(2) and 5.0 kV/cm, respectively, at 263 K.