Av. Stanishevsky et al., ON CORRELATION BETWEEN THE SHAPE OF RAMAN-SPECTRA AND SHORT-RANGE ORDER STRUCTURE OF HYDROGEN-FREE AMORPHOUS-CARBON FILMS, DIAMOND AND RELATED MATERIALS, 6(8), 1997, pp. 1026-1030
Hydrogen-free, hard carbon films prepared by a pulsed cathodic are dis
charge method under different deposition conditions were investigated
using Raman spectroscopy. The influence of a number of deposition para
meters (discharge voltage, temperature and orientation of the substrat
e, admixtures, etc.) on the shape of the Raman spectra is considered.
The maximum of the Raman intensity ratio R = I-500/I-1550 and the mini
mum of the slope S=(I-1300-I-1100)/I-1100 are demonstrated to correspo
nd to the highest diamond-like properties of the films. The numerical
correlation of R and S with the sp(3)/sp(3) ratio is established. The
presented results show that the spectral parameters R and S are suitab
le for quantitatively characterizing films with an sp3/sp2 ratio large
r than 0.3. (C) 1997 Elsevier Science S.A.