Surface-micromachined polysilicon MOEMS for adaptive optics

Citation
J. Comtois et al., Surface-micromachined polysilicon MOEMS for adaptive optics, SENS ACTU-A, 78(1), 1999, pp. 54-62
Citations number
12
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS A-PHYSICAL
ISSN journal
0924-4247 → ACNP
Volume
78
Issue
1
Year of publication
1999
Pages
54 - 62
Database
ISI
SICI code
0924-4247(19991123)78:1<54:SPMFAO>2.0.ZU;2-D
Abstract
This paper presents an overview of Air Force research and development progr ams in micro-opto-electro-mechanical systems (MOEMS) for adaptive optics us ing commercially available surface-micromachined polysilicon fabrication pr ocesses. Adaptive optic systems are a growing area of interest because adva nced technologies are now becoming available to make these systems lightwei ght, low power, and compact. In short, they are becoming practical for spac e;missile, and man-portable applications. The technologies that are making this possible include highly integrated low power electronics, new processi ng architectures for error sensing and control, flexible high density packa ging, and especially MOEMS. Micromirror design, mirror array design, and de sign tradeoffs are discussed, as well as high density packaging for combini ng MEMS-specific die with standard electronic die. The micromirror devices described below were developed for adaptive optic systems, and for explorin g the design, manufacture, and actuation options made possible by the comme rcial surface-micromachining fabrication processes. (C) 1999 Elsevier Scien ce S.A. All rights reserved.