Structure and piezoelectric properties of 0.9 Pb(Zr,Ti)O-3-0.1 Pb(Mg,Nb)O-3 films prepared by metalorganic deposition process

Citation
K. Sumi et al., Structure and piezoelectric properties of 0.9 Pb(Zr,Ti)O-3-0.1 Pb(Mg,Nb)O-3 films prepared by metalorganic deposition process, JPN J A P 1, 38(2A), 1999, pp. 886-889
Citations number
16
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Volume
38
Issue
2A
Year of publication
1999
Pages
886 - 889
Database
ISI
SICI code
0021-4922(199902)38:2A<886:SAPPO0>2.0.ZU;2-2
Abstract
The 800-nm-thick 0.9 Pb(Zr,Ti)O-3-0.1 Pb(Mg,Nb)O-3 (PZT-PMN) were prepared by metalorganic deposition (MOD) process on Ti/Pt/Ti bottom electrodes. The structure of the films was investigated by scanning electron microscopy an d X-ray diffraction. The piezoelectric properties of the films were charact erized by measuring the electrically induced strain using the cantilever me thod to determine the piezoelectric charge constant (d(31)) and by measurin g the mechanically induced voltage. The films retain the tetragonal perovsk ite structure with both [100] and [111] preferred orientations anti are mad e up of columnar grains whose size ranges from 100 nm to 200 nm. The plot o f strain versus electrical field shows a hysteresis loop, which reveals tha t the strain depends on the polarity Of the top electrode. The unpoled film is virginally polarized toward the bottom electrode. As a result, d(31) at an electrical field of 170 kV/cm is 190 pC/N for positive polarity and 166 pC/N for negative polarity.