PLASMA CONDUCTIVITY ESTIMATION IN INDUCTIVELY-COUPLED ELECTRODELESS DISCHARGE BY EQUIVALENT-CIRCUIT

Citation
Y. Watanabe et al., PLASMA CONDUCTIVITY ESTIMATION IN INDUCTIVELY-COUPLED ELECTRODELESS DISCHARGE BY EQUIVALENT-CIRCUIT, JPN J A P 1, 37(8), 1998, pp. 4568-4571
Citations number
5
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Physics, Applied
Volume
37
Issue
8
Year of publication
1998
Pages
4568 - 4571
Database
ISI
SICI code
0021-4922(1998)37:8<4568:PCEIIE>2.0.ZU;2-N
Abstract
An equivalent distributed constant circuit model for inductively-coupl ed electrodeless discharge, having a double tube structure, is introdu ced. The distribution profile of plasma conductivity in the tube is ca lculated by means of the diffusion equation for electron density. The obtained profile shows good agreement with the measured profile of the excited mercury atom density. Then, plasma conductivity as a function of the induced discharge current is estimated by comparing the experi mental results with the results calculated using the model. The estima ted maximum plasma conductivity, sigma(max), is independent of operati ng frequency and is approximated by the following expression for the e mployed discharge tube: sigma(max) = 0.007814i(D)(2) + 0.4836i(D), whe re i(D) is induced discharge current in A(rms)/m.