TIP-SAMPLE CAPACITANCE IN CAPACITANCE MICROSCOPY OF DIELECTRIC FILMS

Authors
Citation
K. Goto et K. Hane, TIP-SAMPLE CAPACITANCE IN CAPACITANCE MICROSCOPY OF DIELECTRIC FILMS, Journal of applied physics, 84(8), 1998, pp. 4043-4048
Citations number
14
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Physics, Applied
Journal title
ISSN journal
0021-8979
Volume
84
Issue
8
Year of publication
1998
Pages
4043 - 4048
Database
ISI
SICI code
0021-8979(1998)84:8<4043:TCICMO>2.0.ZU;2-Q
Abstract
The tip-sample capacitance in the scanning capacitance microscopy (SCM ) of dielectric films is described through theoretical calculations ba sed on the method of images. The results are explained with the charge density distribution in the tip-sample system. Furthermore, capacitan ce signals in the tapping mode SCM of dielectric films are experimenta lly investigated and found to be in good agreement with the simulation results. (C) 1998 American Institute of Physics. [S0021-8979(98)05820 -4].