PROPERTY EVALUATION OF VAPOR-DEPOSITED TIN FILM BY THE ANALYSIS OF ELASTIC-WAVES - (1ST REPORT, NONDESTRUCTIVE EVALUATION OF ELASTIC PROPERTIES BY LASER-SURFACE ACOUSTIC-WAVES)
H. Cho et al., PROPERTY EVALUATION OF VAPOR-DEPOSITED TIN FILM BY THE ANALYSIS OF ELASTIC-WAVES - (1ST REPORT, NONDESTRUCTIVE EVALUATION OF ELASTIC PROPERTIES BY LASER-SURFACE ACOUSTIC-WAVES), JSME international journal. Series A, Solid mechanics and material engineering, 41(3), 1998, pp. 439-445
The elastic properties of TiN films deposited on stainless steel SUS31
7J2 by three physical vapor deposition methods were estimated from the
velocity dispersion of laser surface acoustic waves (SAWs) in the fre
quency range of 30 to 60 MHz. The velocity dispersion of Rayleigh wave
s was obtained by the scanning interference fringes (SIF) system and w
as used to estimate the elastic stiffness of the films. Depending on t
he deposition method, Young's moduli of TiN films were found to increa
se in the order of activation reaction method (ARE) --> hollow cathode
discharge (HCD) --> are ion discharge (AID) method. The attenuation o
f SAWs was the highest for AID film due to the poor quality of the fil
m.