METHANE AND NITROGEN PLASMA IMMERSION ION-IMPLANTATION OF TITANIUM METAL

Citation
By. Tang et al., METHANE AND NITROGEN PLASMA IMMERSION ION-IMPLANTATION OF TITANIUM METAL, Surface & coatings technology, 104, 1998, pp. 248-251
Citations number
15
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Materials Science, Coatings & Films
Journal title
ISSN journal
0257-8972
Volume
104
Year of publication
1998
Pages
248 - 251
Database
ISI
SICI code
0257-8972(1998)104:<248:MANPII>2.0.ZU;2-P
Abstract
Plasma immersion ion implantation (PIII) is employed to enhance the tr ibological properties of titanium. The effectiveness of methane PIII a nd glow discharge nitrogen PIII, as well as radio-frequency (RF) nitro gen PIII, is compared by measuring the microhardness, mass loss due to wear and the coefficient of friction of samples treated by the three methods. Nitrogen PIII is a hybrid surface treatment technique combini ng nitrogen-ion implantation, which occurs during the high-voltage pul ses, and plasma nitriding, which takes place in between pulses. Our ex perimental data show that the surface properties of titanium are enhan ced by all three treatment processes, but nitrogen PIII yields better results than methane PIII, and RF nitrogen PIII is the best treatment process of the three. On the basis of our Auger depth profiling result s, the discrepancy appears to be related to the larger penetration dep th (implantation plus radiation-enhanced diffusion) of nitrogen by the RF PIII process. The slight difference between methane PIII and glow discharge nitrogen PIII samples appears to arise from the absolute imp lanted dose. (C) 1998 Elsevier Science S.A.