RETROREFLECTIVE GRATING ANALYSIS VERSUS PHYSICAL MEASUREMENTS OF SURFACE CONTOUR

Authors
Citation
Xz. Zhang et Wp. North, RETROREFLECTIVE GRATING ANALYSIS VERSUS PHYSICAL MEASUREMENTS OF SURFACE CONTOUR, Optical engineering, 37(5), 1998, pp. 1464-1467
Citations number
14
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Optics
Journal title
ISSN journal
0091-3286
Volume
37
Issue
5
Year of publication
1998
Pages
1464 - 1467
Database
ISI
SICI code
0091-3286(1998)37:5<1464:RGAVPM>2.0.ZU;2-N
Abstract
The technique of retroreflective grating analysis is presented to meas ure surface contour. This noncontacting optical method can detect a de nt with maximum depth less than 10 mu m. A comparison with some physic al measuring systems indicates that it has advantage over such contact ing measurements, especially for specular surfaces. (C) 1998 Society o f Photo-Optical instrumentation Engineers. [S0091-3286(95)03105-5].