RAMAN DIAGNOSTICS OF AMORPHOUS DIAMOND-LIKE CARBON-FILMS PRODUCED WITH A MASS-SEPARATED ION-BEAM

Citation
Ly. Khriachtchev et al., RAMAN DIAGNOSTICS OF AMORPHOUS DIAMOND-LIKE CARBON-FILMS PRODUCED WITH A MASS-SEPARATED ION-BEAM, DIAMOND AND RELATED MATERIALS, 6(5-7), 1997, pp. 694-699
Citations number
18
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Material Science
ISSN journal
0925-9635
Volume
6
Issue
5-7
Year of publication
1997
Pages
694 - 699
Database
ISI
SICI code
0925-9635(1997)6:5-7<694:RDOADC>2.0.ZU;2-V
Abstract
Raman spectra of the amorphous hydrogen-free diamond-like films prepar ed in well-controlled conditions by using a mass-separated carbon ion beam are investigated. The Raman spectra of a series of samples deposi t-ed by the same mass-separator set-up but with different energies of carbon ions and characterized by different sp(3) fractions are compare d. The correlation between the sp(3) fraction and the numerical parame ters of Raman spectra recorded in the 100-4100 cm(-1) range, such as ( i) the intensity ratios R-(1) = I-500/I-1500, R-(2) = I-2100/I-3000, R -(3) = I-2100/I-1550 and (ii) the average slope S = (I-1300-I-1100)/I- 1100, is established for each of the five wavelengths of Ar+ laser exc itation. Possible interference distortion of the shape of Raman spectr a is taken into account, The presented results agree with the theoreti cally predicted properties of tetrahedral amorphous carbon and confirm the possibility of the effective quantitative characterization of thi s material by using Raman spectroscopy, The correlations obtained are used for practical studies of spatial properties of the film structure and a significant decrease of the film duality towards the edges of d iamond-like film is observed. (C) 1997 Elsevier Science S.A.