CHARACTERIZATION OF TI(NXOY) COATINGS PRODUCED BY THE ARC ION PLATINGMETHOD

Citation
Y. Makino et al., CHARACTERIZATION OF TI(NXOY) COATINGS PRODUCED BY THE ARC ION PLATINGMETHOD, Surface & coatings technology, 98(1-3), 1998, pp. 934-938
Citations number
12
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Materials Science, Coatings & Films
ISSN journal
0257-8972
Volume
98
Issue
1-3
Year of publication
1998
Pages
934 - 938
Database
ISI
SICI code
0257-8972(1998)98:1-3<934:COTCPB>2.0.ZU;2-L
Abstract
The effect of oxygen addition to TIN was investigated by producing oxy nitride films with the are ion plating method. These titanium oxynitri de films were identified to be NaCl(B1) structure by XRD measurements with theta-2 theta and glancing angle methods. By increasing the conte nt of oxygen in the deposited films, the preferential orientation of t he films changed from the [111] direction to the [200] direction, and the existence of titanium ions with a higher valence, such as Ti3+ and Ti4+ as well as divalent titanium, in the deposited films was indicat ed by the change of Ti-2p photoelectron spectra. From the result on Vi ckers hardness, it was also indicated that suitable addition of oxygen to TiN is preferable to improve the hardness of the TiN films. (C) 19 98 Elsevier Science S.A.