CORROSION BEHAVIOR OF SPUTTERED AMORPHOUS MAGNETIC THIN-FILMS, WITH AND WITHOUT PROTECTIVE OVERLAYERS

Authors
Citation
Jl. Wallace, CORROSION BEHAVIOR OF SPUTTERED AMORPHOUS MAGNETIC THIN-FILMS, WITH AND WITHOUT PROTECTIVE OVERLAYERS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(6), 1994, pp. 3146-3148
Citations number
11
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
ISSN journal
0734-2101
Volume
12
Issue
6
Year of publication
1994
Pages
3146 - 3148
Database
ISI
SICI code
0734-2101(1994)12:6<3146:CBOSAM>2.0.ZU;2-6
Abstract
Thin films of Fe78B13Si9, (similar in chemical composition to Metglas( R) 2605S2) and Fe81B13.5Si3.5C2 (similar to Metglas(R) 2605-SC) with a thickness of approximately 1 mu m were deposited by de magnetron sput tering onto substrates of Si, SiO2, and GaAs. Some of the films were o vercoated with approximately 500 Angstrom of Si3N4; others were overco ated with 300 Angstrom of Si3N4; and others were left uncoated: The sa mples were exposed to various environments ranging from an air-conditi oned laboratory to an outdoor, tropical marine ambient. The morphology , low-frequency magnetic properties, and chemical composition of the f ilms were measured before and after exposure.