SPATIAL DISTRIBUTIONS OF ELECTRON-DENSITY AND TEMPERATURE IN AUDIO FREQUENCY AND RADIO-FREQUENCY MAGNETRON GLOW-DISCHARGES

Citation
Sp. Fusselman et al., SPATIAL DISTRIBUTIONS OF ELECTRON-DENSITY AND TEMPERATURE IN AUDIO FREQUENCY AND RADIO-FREQUENCY MAGNETRON GLOW-DISCHARGES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(6), 1994, pp. 3115-3119
Citations number
10
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
ISSN journal
0734-2101
Volume
12
Issue
6
Year of publication
1994
Pages
3115 - 3119
Database
ISI
SICI code
0734-2101(1994)12:6<3115:SDOEAT>2.0.ZU;2-F
Abstract
The spatial distributions of electron density and temperature in paral lel plate audio frequency (AF) (40 kHz) and radio frequency (RF) (13.5 6 MHz) magnetron discharges were obtained using double Langmuir probes . At 30 W and 580 mTorr argon, electron density ranged from 5X10(8)/cm (3) to 1.5X10(9)/cm(3) and electron temperature ranged from 3.4 to 4.6 eV in the AF discharge. For 30 W net power and 580 mTorr argon in the RF discharge, electron density ranged from 2X10(9)/cm(3) to 8x10(9)/c m(3), and electron temperature ranged from 2.5 to 3.6 eV. Electron tem perature in the AF discharge increases as the discharge axis is approa ched, and is independent of axial position. In the RF discharge electr on temperature increases near the electrode surface. Electron density distributions in both discharges show the influence of magnetic fields , with the maximum electron density occurring at the position where th e radial component of the magnetic field (parallel to the electrode su rface) is at a maximum. In the AF discharge, this influence is no long er apparent at axial distances from the electrode surface beyond 2.5 c m. In the RF discharge, radial variations in electron density characte ristic of magnetic confinement are observed throughout the plasma, eve n at the center plane between electrodes.