IN-SITU POLARIZATION-SENSITIVE LASER-LIGHT-SCATTERING METHOD FOR SIMULTANEOUS MEASUREMENTS OF 2-DIMENSIONAL SPATIAL SIZE AND DENSITY DISTRIBUTIONS OF PARTICLES IN PLASMAS

Citation
M. Shiratani et al., IN-SITU POLARIZATION-SENSITIVE LASER-LIGHT-SCATTERING METHOD FOR SIMULTANEOUS MEASUREMENTS OF 2-DIMENSIONAL SPATIAL SIZE AND DENSITY DISTRIBUTIONS OF PARTICLES IN PLASMAS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(2), 1996, pp. 603-607
Citations number
12
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
ISSN journal
0734-2101
Volume
14
Issue
2
Year of publication
1996
Pages
603 - 607
Database
ISI
SICI code
0734-2101(1996)14:2<603:IPLMFS>2.0.ZU;2-2
Abstract
An in situ polarization-sensitive laser-light-scattering (PSLLS) metho d is developed to measure simultaneously two-dimensional spatial distr ibutions of size and density of particles in plasmas, in order to reve al growth processes and behavior of particles over a discharge space. The system developed can view the whole discharge area of 50X200 mm(2) illuminated by a sheet laser beam with a spatial resolution of 2X2X2 mm(3) and a time resolution of 33 ms, and measure particles larger tha n 50 nm in size and greater than 10(6) cm(-3) in density. Using the PS LLS method, it is found that particles formed in radio frequency silan e plasmas initially appear principally in an annular region around the plasma/sheath boundary near the powered electrode. Moreover, larger p articles tend to reside nearer to the powered electrode about 10 mm of f the discharge-column axis. The region occupied by particles spreads axially toward the grounded electrode (downstream region) and also rad ially toward both the discharge-column axis and the discharge wall, an d then particles flow out of the discharge space with a gas flow. (C) 1996 American Vacuum Society.